|
ITO rotary target
Table 1:
Item |
Specification |
composition |
In2O3:SnO2=90:10(wt%),to match customers’requirements |
purity |
4N(see schedule) |
relative density |
≥99.3%(theoretical density is 7.15g/cm3) |
resistivity |
≤1.8Ω·mm2/m |
deoxygenation coefficient |
≤0.5% |
physical specifications |
rotary, its size and the deviation from the two sides agreed to supply and demand |
appearance |
exterior color uniformity; surface smooth, free of cracks, chipping, and without any inclusions and contaminants |
internal defects |
internal no cracks, no exotic matter |
Schedule:
Impurities(×10-6)less than unit:wt% |
Fe |
Pb |
Zn |
Ni |
Cu |
Cd |
Al |
Si |
Ca |
Mg |
15 |
10 |
10 |
5 |
5 |
5 |
15 |
15 |
15 |
5 |
|
|
|